Ion-sensitive structure and method of manufacturing the same
Author: | Eberhard Kurth, Christian Kunath, Harald Schenk |
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Document Type: | Patent |
Language: | English |
Year of publication: | 2016 |
Patent number: | DE 10 2015 204921 |
Patent number: | EP 3070463 |
Patent number: | US 2016274057 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Mikro- und Nanosysteme |