Transport of Sputtered Particles in Capacitive Sputter Sources
Author: | Jan TrieschmannORCiD, Thomas MussenbrockORCiDGND |
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DOI: | https://doi.org/10.1063/1.4926878 |
ISSN: | 1089-7550 |
ISSN: | 0021-8979 |
Title of the source (English): | Journal of Applied Physics |
Document Type: | Scientific journal article peer-reviewed |
Language: | English |
Year of publication: | 2015 |
Volume/Year: | 118 |
Issue number: | 3 |
First Page: | 033302 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Theoretische Elektrotechnik |