MetadatenAuthor: | Denis Eremin, Stefan Bienholz, Daniel Szeremley, Jan TrieschmannORCiD, Stefan Ries, Peter AwakowiczGND, Thomas MussenbrockORCiDGND, Ralf Peter Brinkmann |
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DOI: | https://doi.org/10.1088/0963-0252/25/2/025020 |
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ISSN: | 1361-6595 |
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ISSN: | 0963-0252 |
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Title of the source (English): | Plasma Sources Science and Technology |
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Document Type: | Scientific journal article peer-reviewed |
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Language: | English |
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Year of publication: | 2016 |
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Volume/Year: | 25 |
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Issue number: | 2 |
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First Page: | 025020 |
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Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Theoretische Elektrotechnik |
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