Particle-in-Cell/Test-Particle Simulations of Technological Plasmas: Sputtering Transport in Capacitive Radio Frequency Discharges
Author: | Jan TrieschmannORCiD, Frederik Schmidt, Thomas MussenbrockORCiDGND |
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DOI: | https://doi.org/10.1002/ppap.201600140 |
ISSN: | 1612-8869 |
Title of the source (English): | Plasma Processes and Polymers |
Document Type: | Scientific journal article peer-reviewed |
Language: | English |
Year of publication: | 2017 |
Volume/Year: | 14 |
Issue number: | 1-2 |
First Page: | 1600140 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Theoretische Elektrotechnik |