Method for generating a micromechanical structure
Author: | Denis Jung, Christian Drabe, Harald Schenk, Thilo Sandner, Thomas Klose, Alexander Wolter |
---|---|
Document Type: | Patent |
Language: | English |
Year of publication: | 2013 |
Patent number: | DE 10 2008 013 116 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Mikro- und Nanosysteme |