Micromechanical device with tilted electrodes
Author: | Harald Schenk, Thilo Sandner, Christian Drabe, Thomas Klose, Denis Jung |
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Document Type: | Patent |
Language: | English |
Year of publication: | 2012 |
Patent number: | DE 10 2008 012 825 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Mikro- und Nanosysteme |