Method for the compensation of deviations occurring as a result of manufacture in the manufacture of micromechanical elements and their use
Author: | Thomas Klose, Alexander Wolter, Harald Schenk |
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Document Type: | Patent |
Language: | English |
Year of publication: | 2012 |
Patent number: | DE10 2006 043 388 (10.04.2008) |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Mikro- und Nanosysteme |