Micro Mirrors
Author: | Harald Schenk, L. J. Hornbeck |
---|---|
ISBN: | 978-3-527-40927-3 |
Title of the source (English): | Nanoelectronics and information technology : advanced electronic materials and novel devices |
Publisher: | Wiley-VCH-Verlag |
Place of publication: | Weinheim |
Editor: | Rainer Waser |
Document Type: | Part of a book (chapter) |
Language: | English |
Year of publication: | 2012 |
First Page: | 985 |
Last Page: | 999 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Mikro- und Nanosysteme |