MetadatenAuthor: | Cornelius Sicker, Jörg Heber, Dirk Berndt, Florian Rückerl, Jean-Yves Tinevez, Spencer Shorte, Michael Wagner, Harald Schenk |
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ISBN: | 978-1-62841-465-3 |
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Title of the source (English): | MOEMS and miniaturized systems XIV, 9 - 12 February 2015, San Francisco, California, United States |
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Publisher: | SPIE |
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Place of publication: | Bellingham, Wash. |
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Document Type: | Scientific journal article not peer-reviewed |
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Language: | English |
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Year of publication: | 2015 |
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First Page: | 93750D-1 |
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Last Page: | 93750D-10 |
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Series ; volume number: | Proceedings of SPIE ; 9375 |
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Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Mikro- und Nanosysteme |
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