A small-gap electrostatic micro-actuator for large deflections
Author: | Holger Conrad, Harald Schenk, Bert Kaiser, Sergiu Langa, Matthieu Gaudet, Klaus Schimmanz, Michael Stolz, Miriam Lenz |
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DOI: | https://doi.org/10.1038/ncomms10078 |
ISSN: | 2041-1723 |
Title of the source (English): | Nature Communications |
Document Type: | Scientific journal article peer-reviewed |
Language: | English |
Year of publication: | 2015 |
Issue number: | 6 |
First Page: | 10078 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Mikro- und Nanosysteme |