Electronic properties of interfaces produced by silicon wafer hydrophilic bonding
Author: | Maxim Trushin |
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URN: | urn:nbn:de:kobv:co1-opus-22841 |
Document Type: | Doctoral thesis |
Language: | English |
Year of publication: | 2011 |
Number of pages: | 180 Bl. |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Experimentalphysik und funktionale Materialien |