Nonlinear Characterization of the Surface of Silicon Wafers: In-situ Detection of External Stress
Author: | Jürgen ReifGND, Reiner P. Schmid, Thomas Schneider, Dirk Wolfframm |
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ISSN: | 0038-1101 |
Title of the source (English): | Solid State Electronics 44 |
Document Type: | Scientific journal article peer-reviewed |
Language: | English |
Year of publication: | 2000 |
Volume/Year: | 44 |
Issue number: | 5 |
First Page: | 809 |
Last Page: | 813 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Experimentalphysik und funktionale Materialien |