Mechanical Properties of nitrogen-doped CZ silicon crystals
Author: | Valeri Orlov, Hans Richter, A. Fischer, Jürgen ReifGND, T. Müller, R. Wahlich |
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ISSN: | 1369-8001 |
Title of the source (English): | Materials Science in Semiconductor Processing 5 |
Document Type: | Scientific journal article peer-reviewed |
Language: | English |
Year of publication: | 2002 |
Volume/Year: | 5 |
Issue number: | 4-5 |
First Page: | 403 |
Last Page: | 407 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Experimentalphysik und funktionale Materialien |