Properties of dislocation networks formed by Si wafer direct bonding
Author: | Xuegong Yu, Tzanimir V. ArguirovGND, Martin Kittler, Winfried Seifert, Markus Ratzke, Manfred Reiche |
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DOI: | https://doi.org/10.1016/j.mssp.2006.01.070 |
Title of the source (English): | Materials Science in Semiconductor Processing |
Document Type: | Scientific journal article peer-reviewed |
Language: | English |
Year of publication: | 2006 |
Volume/Year: | 9 |
Issue number: | 1-3 |
First Page: | 96 |
Last Page: | 101 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Experimentalphysik und funktionale Materialien |