MetadatenAuthor: | Anna Schäfer, Fabian Wendt, Siegfried Mantl, Hilde Hartdegen, Martin Mikulics, Jürgen Schubert, Martina Luysberg, Astrid Besmehn, Gang Niu, Thomas Schroeder |
---|
DOI: | https://doi.org/10.1116/1.4904401 |
---|
Title of the source (English): | Journal of Vacuum Science and Technology : B |
---|
Document Type: | Scientific journal article peer-reviewed |
---|
Language: | English |
---|
Year of publication: | 2015 |
---|
Volume/Year: | 33 |
---|
First Page: | 01A104 |
---|
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Halbleitermaterialien |
---|