Finite element analysis of mechanically amplified CMUTs

  • We introduce the possibility of improving a single-cell capacitive micromachined ultrasonic transducer (CMUT) for air-coupled ultrasound by simply adding a hollow conical-shaped structure (horn) on top of the CMUT plate. The main objective is to improve both transmit and receive sensitivity by lowering the center-to-average displacement ratio, which for bending plate operated devices inherently is limited. In addition, for receive mode the force generated from the impinging sound pressure wave is concentrated to the center of the plate, resulting in larger signals and, in contrast to piston-shaped plates, the horn has the advantage of only moderately increasing the modal mass of the structure. By using finite element analysis and first sound pressure measurements of our modified CMUT, we demonstrate that this idea is feasible and promising for air-coupled CMUTs operating at frequencies below 150kHz, as it has been been proven to be successful for commercially available piezoelectric - driven bending plate devices as well.

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Metadaten
Author: Alexander Unger, Maik Hoffmann, Min-Chieh Ho, Kwan Kyu Park, Butrus T. Khuri-Yakub, Mario Kupnik
DOI:https://doi.org/10.1109/ULTSYM.2013.0074
Title of the source (English):Proceedings, 2013 IEEE International Ultrasonics Symposium
Publisher:IEEE
Document Type:Conference Proceeding
Language:English
Year of publication:2013
First Page:287
Last Page:290
Faculty/Chair:Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Elektronische Systeme und Sensorik
Institution name at the time of publication:Fakultät für Maschinenbau, Elektrotechnik und Wirtschaftsingenieurwesen (eBTU) / LS Allgemeine Elektrotechnik und Messtechnik
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